Measurements of variable angle spectroscopic ellipsometry (VASE) to determine thickness and optical constants of thin films. Automated angle adjustment in the range 40-90°. Wavelength range 370-1000 nm. 


1) Liquid heated (<50°C) cell for in-situ studies on the liquid/solid interface
2) Heat stage (-70 - 600°C) to measure thickness and optical constant variations as a function of time and temperature.